- 专利标题: Plate design to decrease noise in semiconductor devices
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申请号: US17405307申请日: 2021-08-18
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公开(公告)号: US11923429B2公开(公告)日: 2024-03-05
- 发明人: Chih-Chang Cheng , Fu-Yu Chu , Ming-Ta Lei , Ruey-Hsin Liu , Shih-Fen Huang
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L21/265 ; H01L21/28 ; H01L29/06 ; H01L29/08 ; H01L29/78 ; H01L29/49
摘要:
A semiconductor device and method for forming the semiconductor device are provided. In some embodiments, a semiconductor substrate comprises a device region. An isolation structure extends laterally in a closed path to demarcate the device region. A first source/drain region and a second source/drain region are in the device region and laterally spaced. A sidewall of the first source/drain region directly contacts the isolation structure at a first isolation structure sidewall, and remaining sidewalls of the first source/drain region are spaced from the isolation structure. A selectively-conductive channel is in the device region, and extends laterally from the first source/drain region to the second source/drain region. A plate comprises a central portion and a first peripheral portion. The central portion overlies the selectively-conductive channel, and the first peripheral portion protrudes from the central portion towards the first isolation structure sidewall.
公开/授权文献
- US20210376100A1 PLATE DESIGN TO DECREASE NOISE IN SEMICONDUCTOR DEVICES 公开/授权日:2021-12-02
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