Invention Grant
- Patent Title: Organic contamination free surface machining
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Application No.: US18097152Application Date: 2023-01-13
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Publication No.: US11932950B2Publication Date: 2024-03-19
- Inventor: Yuanhong Guo , Sheng Michael Guo , Marek W. Radko , Steven Victor Sansoni , Nagendra Madiwal , Matvey Farber , Pingping Gou , Song-Moon Suh , Jeffrey C. Hudgens , Yuji Murayama , Anurag Bansal , Shaofeng Chen , Michael Kuchar
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: B08B3/04
- IPC: B08B3/04 ; B23C3/00 ; C23C14/58 ; C23F1/16 ; C23F1/20 ; C23F17/00 ; H01L21/67

Abstract:
A method includes machining a raw surface of a metal component to remove first native oxide from a metal base of the metal component to generate an as-machined surface of the metal component. A second native oxide is formed on the metal base of the as-machined surface of the metal component subsequent to the machining. The method further includes, subsequent to the machining, performing operations to generate a finished surface of the metal component. The operations include a surface machining of the as-machined surface of the metal component to remove the second native oxide.
Public/Granted literature
- US20230151497A1 ORGANIC CONTAMINATION FREE SURFACE MACHINING Public/Granted day:2023-05-18
Information query
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