Invention Grant
- Patent Title: Sublimation cell with time stability of output vapor pressure
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Application No.: US15982187Application Date: 2018-05-17
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Publication No.: US11946131B2Publication Date: 2024-04-02
- Inventor: Gregory McGraw , Edwin Van Den Tillaart , William E. Quinn , Sven Pekelder , Matthew King
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Agency: Butzel Long
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/12 ; C23C14/22 ; H10K50/11 ; H10K50/15 ; H10K50/16 ; H10K50/18 ; H10K50/81 ; H10K50/82 ; B05D1/00 ; H10K71/16

Abstract:
Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.
Public/Granted literature
- US20180340253A1 SUBLIMATION CELL WITH TIME STABILITY OF OUTPUT VAPOR PRESSURE Public/Granted day:2018-11-29
Information query
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