公开(公告)号：US12043042B2

公开(公告)日：2024-07-23

申请号：US17242599

申请日：2021-04-28

Applicant: Universal Display Corporation

Inventor： Peter van Putten ,  Sven Pekelder ,  Mark Meuwese ,  Maurits Willenbroek ,  Piet van Rens

IPC: B41J25/308 ,  B41J11/00 ,  B41J25/00 ,  B41J25/316 ,  C23C14/04 ,  C23C14/12 ,  C23C14/22 ,  C23C14/54

CPC classification number: B41J25/308 ,  B41J11/008 ,  B41J25/001 ,  B41J25/3086 ,  B41J25/316 ,  C23C14/04 ,  C23C14/12 ,  C23C14/228 ,  C23C14/54

Abstract: A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head moveable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.

公开(公告)号：US11981987B2

公开(公告)日：2024-05-14

申请号：US17510529

申请日：2021-10-26

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H10K71/13 ,  H10K85/30

CPC classification number: C23C14/24 ,  C23C14/12 ,  C23C16/45517 ,  C23C16/45525 ,  C23C16/45563 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578 ,  C23C16/545 ,  H10K71/135 ,  H10K85/342

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US20170291187A1

公开(公告)日：2017-10-12

申请号：US15483251

申请日：2017-04-10

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Peter van Putten ,  Sven Pekelder ,  Mark Meuwese ,  Maurits Willenbroek ,  Piet van Rens

IPC: B05B15/10 ,  B05B9/00 ,  B05D1/00

CPC classification number: B05B15/70 ,  B41J25/001 ,  B41J25/3086

Abstract: A device for use in OVJP and similar arrangements includes a print head movable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.

公开(公告)号：US11946131B2

公开(公告)日：2024-04-02

申请号：US15982187

申请日：2018-05-17

Applicant: Universal Display Corporation

Inventor： Gregory McGraw ,  Edwin Van Den Tillaart ,  William E. Quinn ,  Sven Pekelder ,  Matthew King

IPC: C23C14/24 ,  C23C14/12 ,  C23C14/22 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/00 ,  H10K71/16

CPC classification number: C23C14/243 ,  C23C14/12 ,  C23C14/228 ,  H10K50/11 ,  H10K50/15 ,  H10K50/16 ,  H10K50/18 ,  H10K50/81 ,  H10K50/82 ,  B05D1/60 ,  H10K71/16

Abstract: Designs and arrangements for sublimation cells are provided, which enriches an inert carrier gas with organic vapor such that the partial pressure of the organic vapor is highly stable in time. Stability is achieved by controlling the local rates of evaporation along the solid-gas interface through one or more crucibles, thereby reducing the effects of greater headspace and lowering interfacial area as the source depletes. Local evaporation rates also can be controlled using either temperature distribution or convective flow fields.

公开(公告)号：US20170294615A1

公开(公告)日：2017-10-12

申请号：US15475408

申请日：2017-03-31

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: H01L51/50 ,  H01L51/56 ,  B05B1/00 ,  H01L51/00

CPC classification number: C23C14/24 ,  C23C14/12 ,  H01L51/0005 ,  H01L51/0085

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US20240279789A1

公开(公告)日：2024-08-22

申请号：US18610937

申请日：2024-03-20

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H10K71/13 ,  H10K85/30

CPC classification number: C23C14/24 ,  C23C14/12 ,  C23C16/45517 ,  C23C16/45525 ,  C23C16/45563 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45578 ,  C23C16/545 ,  H10K71/135 ,  H10K85/342

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US11168391B2

公开(公告)日：2021-11-09

申请号：US15475408

申请日：2017-03-31

Applicant: Universal Display Corporation

Inventor： Edwin van den Tillaart ,  Sven Pekelder ,  Mark Meuwese ,  William E. Quinn ,  Gregory McGraw ,  Gregg Kottas

IPC: C23C14/24 ,  C23C14/12 ,  C23C16/455 ,  C23C16/54 ,  H01L51/00

Abstract: A deposition nozzle is provided that includes offset deposition apertures disposed between exhaust apertures on either side of the deposition apertures. The provided nozzle arrangements allow for deposition of material with a deposition profile suitable for use in devices such as OLEDs.

公开(公告)号：US20210245533A1

公开(公告)日：2021-08-12

申请号：US17242599

申请日：2021-04-28

Applicant: Universal Display Corporation

Inventor： Peter van Putten ,  Sven Pekelder ,  Mark Meuwese ,  Maurits Willenbroek ,  Piet van Rens

IPC: B41J25/308 ,  B41J25/00 ,  B41J25/316 ,  B41J11/00

Abstract: A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head moveable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.

公开(公告)号：US11014386B2

公开(公告)日：2021-05-25

申请号：US15483251

申请日：2017-04-10

Applicant: UNIVERSAL DISPLAY CORPORATION

Inventor： Peter van Putten ,  Sven Pekelder ,  Mark Meuwese ,  Maurits Willenbroek ,  Piet van Rens

IPC: B41J25/308 ,  B41J25/316 ,  B41J11/00 ,  B41J25/00

Abstract: A device for use in organic vapor jet printing (OVJP) and similar arrangements includes a print head movable in more than one degree of freedom with sufficient thermal insulation that there is little to no movement in the Z direction. One or more sensors may be used to monitor and adjust the distance between the substrate and the print head.