Invention Grant
- Patent Title: Systems and methods for performing sample lift-out for highly reactive materials
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Application No.: US17566904Application Date: 2021-12-31
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Publication No.: US11972923B2Publication Date: 2024-04-30
- Inventor: Christopher Thompson , Dustin Ellis , Adam Stokes , Ronald Kelley , Cedric Bouchet-Marquis
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Michael Best & Friedrich LLP
- Main IPC: H01J37/305
- IPC: H01J37/305 ; H01J37/20 ; H01J37/244 ; H01J37/28

Abstract:
Methods and systems for creating attachments between a sample manipulator and a sample within a charged particle systems are disclosed herein. Methods include translating a sample manipulator so that it is proximate to a sample, and milling portions of the sample manipulator such that portions are removed. The portion of the sample manipulator proximate to the sample is composed of a high sputter yield material, and the high sputter yield material may be the material milled with the charged particle beam such that it is removed from the sample manipulator. According to the present disclosure, the portions of the sample manipulator are milled such that at least some of the removed high sputter yield material redeposits to form an attachment between the sample manipulator and the sample.
Public/Granted literature
- US20230215690A1 SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACTIVE MATERIALS Public/Granted day:2023-07-06
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