公开(公告)号：US11972923B2

公开(公告)日：2024-04-30

申请号：US17566904

申请日：2021-12-31

申请人： FEI Company

发明人： Christopher Thompson ,  Dustin Ellis ,  Adam Stokes ,  Ronald Kelley ,  Cedric Bouchet-Marquis

IPC分类号： H01J37/305 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/3056 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/208 ,  H01J2237/31745 ,  H01J2237/31749

摘要： Methods and systems for creating attachments between a sample manipulator and a sample within a charged particle systems are disclosed herein. Methods include translating a sample manipulator so that it is proximate to a sample, and milling portions of the sample manipulator such that portions are removed. The portion of the sample manipulator proximate to the sample is composed of a high sputter yield material, and the high sputter yield material may be the material milled with the charged particle beam such that it is removed from the sample manipulator. According to the present disclosure, the portions of the sample manipulator are milled such that at least some of the removed high sputter yield material redeposits to form an attachment between the sample manipulator and the sample.

公开(公告)号：US09627176B2

公开(公告)日：2017-04-18

申请号：US14989419

申请日：2016-01-06

申请人： FEI Company

发明人： Cedric Bouchet-Marquis ,  Liang Zhang ,  Lee Pullan

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  G01N1/32 ,  G01N23/046 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/226 ,  H01J2237/2611 ,  H01J2237/2802 ,  H01J2237/2826 ,  H01J2237/30433 ,  H01J2237/30438

摘要： Provided are methods to improve tomography by creating fiducial holes using charged particle beams, and using the fiducial holes to improve the sample positioning, acquisition, alignment, reconstruction, and visualization of tomography data sets. Some versions create fiducial holes with an ion beam during the process of milling the sample. Other versions create in situ fiducial holes within the TEM using the electron beam prior to acquiring a tomography data series. In some versions multiple sets of fiducial holes are made, positioned strategically around a region of interest. The fiducial holes may be employed to properly position the features of interest during the acquisition, and later to help better align the tilt-series, and improve the accuracy and resolution of the final reconstruction. The operator or software may identify the holes to be tracked with tomography feature tracking techniques.

公开(公告)号：US20170025246A1

公开(公告)日：2017-01-26

申请号：US14989419

申请日：2016-01-06

申请人： FEI Company

发明人： Cedric Bouchet-Marquis ,  Liang Zhang ,  Lee Pullan

IPC分类号： H01J37/22 ,  H01J37/28

CPC分类号： H01J37/222 ,  G01N1/32 ,  G01N23/046 ,  H01J37/28 ,  H01J37/3045 ,  H01J2237/226 ,  H01J2237/2611 ,  H01J2237/2802 ,  H01J2237/2826 ,  H01J2237/30433 ,  H01J2237/30438

摘要： Provided are methods to improve tomography by creating fiducial holes using charged particle beams, and using the fiducial holes to improve the sample positioning, acquisition, alignment, reconstruction, and visualization of tomography data sets. Some versions create fiducial holes with an ion beam during the process of milling the sample. Other versions create in situ fiducial holes within the TEM using the electron beam prior to acquiring a tomography data series. In some versions multiple sets of fiducial holes are made, positioned strategically around a region of interest. The fiducial holes may be employed to properly position the features of interest during the acquisition, and later to help better align the tilt-series, and improve the accuracy and resolution of the final reconstruction. The operator or software may identify the holes to be tracked with tomography feature tracking techniques.

摘要翻译： 提供了通过使用带电粒子束创建基准孔来改善断层摄影的方法，并且使用基准孔来改进层析成像数据集的样本定位，采集，对准，重建和可视化。 在铣削样品的过程中，一些版本在离子束中产生基准孔。 其他版本在获取断层扫描数据系列之前，使用电子束在TEM内创建原位基准孔。 在一些版本中，制造了多组基准孔，围绕感兴趣区域策略性地定位。 可以使用基准孔来在采集期间适当地定位感兴趣的特征，并且稍后帮助更好地对齐倾斜系列，并且提高最终重建的精度和分辨率。 操作者或软件可以用层析成像特征跟踪技术识别要跟踪的孔。