- 专利标题： EFEM robot auto teaching methodology
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申请号： US17082213申请日： 2020-10-28
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公开(公告)号： US11984331B2公开(公告)日： 2024-05-14
- 发明人: Chien-Fa Lee , Hsu-Shui Liu , Jiun-Rong Pai , Shou-Wen Kuo
- 申请人： Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsinchu
- 代理机构： Eschweiler & Potashnik, LLC
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01L21/677 ; H01L21/68 ; H01L21/687
摘要：
The present disclosure relates to an equipment front end module (EFEM) teaching element. The EFEM teaching element includes a memory element configured to store data describing an initial position of an EFEM robot within an EFEM chamber. A position measurement device is configured to take measurements describing a new position of the EFEM robot within the EFEM chamber that is different than the initial position of the EFEM robot. A controller is configured to determine a set of new movement commands describing a path of the EFEM robot based upon the data describing the initial position of the EFEM robot and the measurements.
公开/授权文献
- US20210043481A1 EFEM ROBOT AUTO TEACHING METHODOLOGY 公开/授权日：2021-02-11
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