利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

48 条记录 (耗时 0.02 秒)

    DEFECT OFFSET CORRECTION
    2.
    发明申请
    DEFECT OFFSET CORRECTION 有权

    公开(公告)号：US20220375057A1

    公开(公告)日：2022-11-24

    申请号：US17881338

    申请日：2022-08-04

    申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

    发明人： Chien-Ko Liao ,  Ya-Hsun Hsueh ,  Sheng-Hsiang Chuang ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo

    IPC分类号： G06T7/00 ,  G06T7/73 ,  G06T5/00 ,  H01L21/66 ,  G06T7/33

    摘要： A method includes: receiving a defect map from a defect scanner, wherein the defect map comprises at least one defect location of a semiconductor workpiece; annotating the defect map with a reference fiducial location of the semiconductor workpiece; determining a detected fiducial location within image data of the semiconductor workpiece; determining an offset correction based on comparing the detected fiducial location with the reference fiducial location; producing a corrected defect map by applying the offset correction to the defect map, wherein the applying the offset correction translocates the at least one defect location; and transferring the corrected defect map to a defect reviewer configured to perform root cause analysis based on the corrected defect map.

    SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND NON-TRANSITORY COMPUTER READABLE STORAGE MEDIUM
    4.
    发明申请
    SEMICONDUCTOR EQUIPMENT MANAGEMENT METHOD, ELECTRONIC DEVICE, AND NON-TRANSITORY COMPUTER READABLE STORAGE MEDIUM 审中-公开

    公开(公告)号：US20190163149A1

    公开(公告)日：2019-05-30

    申请号：US16028422

    申请日：2018-07-06

    申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

    发明人： Sing-Tsung Li ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Sheng-Hsiang Chuang ,  Shou-Wen Kuo ,  Chien-Ko Liao

    IPC分类号： G05B19/042 ,  G06T7/00

    摘要： A semiconductor equipment management method applicable to an electronic device for managing multiple pieces of semiconductor equipment is provided. The pieces of semiconductor equipment are respectively controlled through multiple control hosts, and the control hosts and the electronic device are connected to a switch device. The method includes: receiving real-time image information of each control host through the switch device; determining whether the real-time image information of each control host includes a triggering event by performing an image recognition on the real-time image information; executing a macro corresponding to the triggering event, where the macro includes at least one self-defined operation; generating at least one input command according to the self-defined operation of the executed macro; and controlling the control hosts to execute the self-defined operation of the executed macro by transmitting the input command to the control hosts through the switch device.

    EFEM ROBOT AUTO TEACHING METHODOLOGY
    6.
    发明申请
    EFEM ROBOT AUTO TEACHING METHODOLOGY 审中-公开

    公开(公告)号：US20190051546A1

    公开(公告)日：2019-02-14

    申请号：US15822865

    申请日：2017-11-27

    申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

    发明人： Chien-Fa Lee ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo

    IPC分类号： H01L21/67 ,  H01L21/677

    摘要： The present disclosure relates to a method of automatically re-programming an EFEM to account for positional changes of the EFEM robot. In some embodiments, the method is performed by determining an initial position of an EFEM robot within an EFEM chamber. The EFEM robot at the initial position moves along a first plurality of steps defined relative to the initial position and that extend along a path between a first position and a second position. Positional parameters are determined, which describe a change between an initial position and a new position of the EFEM robot that is different than the initial position. A second plurality of steps are determined based upon the positional parameters. The EFEM robot at the new position moves along the second plurality of steps defined relative to the new position and that extend along the path between the first position and the second position.

    EFEM robot auto teaching methodology
    9.
    发明授权
    EFEM robot auto teaching methodology 有权

    公开(公告)号：US10861723B2

    公开(公告)日：2020-12-08

    申请号：US15822865

    申请日：2017-11-27

    申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

    发明人： Chien-Fa Lee ,  Hsu-Shui Liu ,  Jiun-Rong Pai ,  Shou-Wen Kuo

    IPC分类号： H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  H01L21/687

    摘要： The present disclosure relates to a method of automatically re-programming an EFEM to account for positional changes of the EFEM robot. In some embodiments, the method is performed by determining an initial position of an EFEM robot within an EFEM chamber. The EFEM robot at the initial position moves along a first plurality of steps defined relative to the initial position and that extend along a path between a first position and a second position. Positional parameters are determined, which describe a change between an initial position and a new position of the EFEM robot that is different than the initial position. A second plurality of steps are determined based upon the positional parameters. The EFEM robot at the new position moves along the second plurality of steps defined relative to the new position and that extend along the path between the first position and the second position.