Invention Grant
- Patent Title: EFEM robot auto teaching methodology
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Application No.: US17082213Application Date: 2020-10-28
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Publication No.: US11984331B2Publication Date: 2024-05-14
- Inventor: Chien-Fa Lee , Hsu-Shui Liu , Jiun-Rong Pai , Shou-Wen Kuo
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677 ; H01L21/68 ; H01L21/687

Abstract:
The present disclosure relates to an equipment front end module (EFEM) teaching element. The EFEM teaching element includes a memory element configured to store data describing an initial position of an EFEM robot within an EFEM chamber. A position measurement device is configured to take measurements describing a new position of the EFEM robot within the EFEM chamber that is different than the initial position of the EFEM robot. A controller is configured to determine a set of new movement commands describing a path of the EFEM robot based upon the data describing the initial position of the EFEM robot and the measurements.
Public/Granted literature
- US20210043481A1 EFEM ROBOT AUTO TEACHING METHODOLOGY Public/Granted day:2021-02-11
Information query
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