- 专利标题: Non-planar transistor arrangements with asymmetric gate enclosures
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申请号: US16892447申请日: 2020-06-04
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公开(公告)号: US11984487B2公开(公告)日: 2024-05-14
- 发明人: Sean T. Ma , Guillaume Bouche
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Akona IP PC
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L21/8234 ; H01L27/088 ; H01L27/092 ; H01L29/06 ; H01L29/10 ; H01L29/51 ; H01L29/66 ; H01L29/775 ; H01L29/78 ; H01L29/786 ; B82Y10/00
摘要:
Disclosed herein are non-planar transistor (e.g., nanoribbon) arrangements having asymmetric gate enclosures on at least one side. An example transistor arrangement includes a channel material shaped as a nanoribbon, and a gate stack wrapping around at least a portion of a first face of the nanoribbon, a sidewall, and a portion of a second face of the nanoribbon. Portions of the gate stack provided over the first and second faces of the nanoribbon extend in a direction parallel to the longitudinal axis of the nanoribbon for a certain distance that may be referred to as a “gate length.” A portion of the gate stack wrapping around the sidewall of the nanoribbon does not extend along the entire gate length, but, rather, extends over less than a half of the gate length, e.g., about one third of the gate length, thus making the gate enclosure on that sidewall asymmetric.
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