Invention Grant
- Patent Title: Three-dimensional memory device including aluminum alloy word lines and method of making the same
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Application No.: US17399710Application Date: 2021-08-11
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Publication No.: US11990413B2Publication Date: 2024-05-21
- Inventor: Linghan Chen , Raghuveer S. Makala , Fumitaka Amano
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: THE MARBURY LAW GROUP PLLC
- Main IPC: H01L23/532
- IPC: H01L23/532 ; H01L21/768 ; H01L23/522 ; H10B41/27 ; H10B43/27

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers. The electrically conductive layers include an intermetallic alloy of aluminum and at least one metal other than aluminum. Memory openings vertically extend through the alternating stack. Memory opening fill structures are located in a respective one of the memory openings and include a respective vertical semiconductor channel and a respective vertical stack of memory elements.
Public/Granted literature
- US20230051815A1 THREE-DIMENSIONAL MEMORY DEVICE INCLUDING ALUMINUM ALLOY WORD LINES AND METHOD OF MAKING THE SAME Public/Granted day:2023-02-16
Information query
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