- 专利标题: Semiconductor memory device
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申请号: US18176656申请日: 2023-03-01
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公开(公告)号: US12022657B2公开(公告)日: 2024-06-25
- 发明人: Toshifumi Minami , Atsuhiro Sato , Keisuke Yonehama , Yasuyuki Baba , Hiroshi Shinohara , Hideyuki Kamata , Teppei Higashitsuji
- 申请人: KIOXIA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Kioxia Corporation
- 当前专利权人: Kioxia Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Kim & Stewart LLP
- 优先权: JP 14182641 2014.09.08
- 主分类号: H10B43/27
- IPC分类号: H10B43/27 ; H01L29/792 ; H10B41/20 ; H10B41/27 ; H10B43/00 ; H10B43/10 ; H10B43/20 ; H10B43/35
摘要:
A semiconductor memory device includes a conducting layer and an insulating layer that are disposed above a semiconductor substrate, a plurality of pillars that extend in a direction which crosses a surface of the semiconductor substrate, and a plate that is disposed between the plurality of pillars and extends in the same direction as the pillars. A surface of the plate, which faces the pillars, has convex portions and non-convex portions.
公开/授权文献
- US20230209829A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2023-06-29
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