- 专利标题: Three dimensional memory device containing dummy word lines and p-n junction at joint region and method of making the same
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申请号: US17485949申请日: 2021-09-27
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公开(公告)号: US12035520B2公开(公告)日: 2024-07-09
- 发明人: Yanli Zhang , Peng Zhang
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: THE MARBURY LAW GROUP PLLC
- 主分类号: H10B41/20
- IPC分类号: H10B41/20 ; H10B41/10 ; H10B41/41 ; H10B43/10 ; H10B43/20 ; H10B43/40
摘要:
A three-dimensional memory device includes a first alternating stack of first insulating layers and first electrically conductive layers located over a semiconductor material layer, an inter-tier dielectric layer, and a second alternating stack of second insulating layers and second electrically conductive layers located over the inter-tier dielectric layer. A memory opening vertically extends through the second alternating stack, the inter-tier dielectric layer, and the first alternating stack. A memory opening fill structure is located in the memory opening, and includes a first vertical semiconductor channel, a second vertical semiconductor channel, and an inter-tier doped region located between the first and the second semiconductor channel, and providing a first p-n junction with the first vertical semiconductor channel and providing a second p-n junction with the second vertical semiconductor channel.
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