- 专利标题: Method of bonding substrates, microchip and method of manufacturing the same
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申请号: US15814267申请日: 2017-11-15
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公开(公告)号: US12103246B2公开(公告)日: 2024-10-01
- 发明人: Motohiro Sakai , Shinji Suzuki , Fumitoshi Takemoto , Kenichi Hirose
- 申请人: USHIO DENKI KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: USHIO DENKI KABUSHIKI KAISHA
- 当前专利权人: USHIO DENKI KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Studebaker & Brackett PC
- 优先权: JP 16225765 2016.11.21
- 主分类号: B29C65/74
- IPC分类号: B29C65/74 ; B29C35/08 ; B29C59/14 ; B29C59/16 ; B29C65/00 ; B29C65/02 ; B29C65/14 ; B29L11/00 ; B29L31/00 ; B81C3/00 ; C09J5/02 ; H01L21/18 ; H01L21/20 ; H01L21/67
摘要:
Disclosed herein is a method of bonding substrates, a microchip, and a method of manufacturing the microchip capable of joining two substrates in a higher adhered state even when at least one of the substrate has a warpage or a roll. A method of bonding a first substrate and a second substrate each of which is made of glass or a resin comprises: a surface activating step for activating each of joining surfaces of the first substrate and the second substrate; and a pressurizing step for pressurizing the first substrate and the second substrate in a state that the first substrate and the second substrate are stacked such that respective joining surfaces contact each other. The joining surface of the first substrate and/or the joining surface of the second substrate are constituted with a plurality of joining regions segmented to be separate from one another by a segmenting recessed portion.
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