Invention Grant
- Patent Title: Polishing slurry, method for manufacturing a display device using the same and display device
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Application No.: US16927327Application Date: 2020-07-13
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Publication No.: US12113077B2Publication Date: 2024-10-08
- Inventor: Joon-Hwa Bae , Jin Hyung Park , Bonggu Kang , Seungbae Kang , Heesung Yang , Woojin Cho , Byoung Kwon Choo
- Applicant: Samsung Display Co., LTD. , UBmaterials Inc.
- Applicant Address: KR Yongin-si
- Assignee: UBMATERIALS LNC.
- Current Assignee: UBMATERIALS LNC.
- Current Assignee Address: ; KR Yongin-si
- Agency: KILE PARK REED & HOUTTEMAN PLLC
- Priority: KR 20190095524 2019.08.06
- Main IPC: H01L27/12
- IPC: H01L27/12 ; C09G1/02 ; C09K3/14 ; H01L21/3105

Abstract:
A polishing slurry is disclosed which includes about 0.01 wt % to about 10 wt % of polishing particles, about 0.005 wt % to about 0.1 wt % of a dispersing agent, about 0.001 wt % to about 1 wt % of an oxide-polishing promoter including a pyridine compound, about 0.05 wt % to about 0.1 wt % of a nitride-polishing inhibitor including an amino acid or an anionic organic acid, and water. A method for manufacturing a display device including an active pattern disposed on a base substrate, a gate metal pattern including a gate electrode overlapping the active pattern, a planarized insulation layer disposed on the gate metal pattern, and a source metal pattern disposed on the planarized insulation layer is also disclosed.
Public/Granted literature
- US20210043661A1 POLISHING SLURRY, METHOD FOR MANUFACTURING A DISPLAY DEVICE USING THE SAME AND DISPLAY DEVICE Public/Granted day:2021-02-11
Information query
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