- 专利标题: Three-dimensional memory device containing self-aligned isolation strips and methods for forming the same
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申请号: US17577533申请日: 2022-01-18
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公开(公告)号: US12127406B2公开(公告)日: 2024-10-22
- 发明人: Takaaki Iwai , Takashi Inomata , Takayuki Maekura
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Addison
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Addison
- 代理机构: THE MARBURY LAW GROUP PLLC
- 主分类号: H01L25/18
- IPC分类号: H01L25/18 ; H01L23/00 ; H01L23/535 ; H01L25/00 ; H01L25/065 ; H10B41/27 ; H10B41/35 ; H10B43/27 ; H10B43/35 ; H10B51/20 ; H10B51/30 ; H10B63/00
摘要:
A semiconductor structure includes an alternating stack of insulating layers and composite layers. Each of the composite layers includes a plurality of electrically conductive word line strips laterally extending along a first horizontal direction and a plurality of dielectric isolation strips laterally extending along the first horizontal direction and interlaced with the plurality of electrically conductive word line strips. Rows of memory openings are arranged along the first horizontal direction. Each row of memory openings vertically extends through each insulating layer within the alternating stack and one electrically conductive strip for each of the composite layers. Rows of memory opening fill structures are located within the rows of memory openings. Each of the memory opening fill structures includes a respective vertical stack of memory elements and a respective vertical semiconductor channel.
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