Invention Grant
- Patent Title: Method of forming structures using a neutral beam
-
Application No.: US18130959Application Date: 2023-04-05
-
Publication No.: US12129548B2Publication Date: 2024-10-29
- Inventor: Tomohiro Kubota , Mitsuya Utsuno , Toshihisa Nozawa , Seiji Samukawa , Hua Hsuan Chen
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/40 ; C23C16/48 ; H05H3/02
Abstract:
Methods of forming structures using a neutral beam, structures formed using a neutral beam, and reactor systems for forming the structures are disclosed. The neutral beam can be used to provide activated species during deposition of a layer and/or to provide activated species to treat a deposited layer.
Public/Granted literature
Information query
IPC分类:
