Invention Grant
- Patent Title: Resonator, linear accelerator configuration and ion implantation system having rotating exciter
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Application No.: US18373128Application Date: 2023-09-26
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Publication No.: US12144101B2Publication Date: 2024-11-12
- Inventor: Costel Biloiu , David T. Blahnik , Wai-Ming Tam , Charles T. Carlson , Frank Sinclair
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDW FIRM PLLC
- Main IPC: H05H7/02
- IPC: H05H7/02 ; H05H7/12 ; H05H9/00
Abstract:
An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.
Public/Granted literature
- US20240032183A1 RESONATOR, LINEAR ACCELERATOR CONFIGURATION AND ION IMPLANTATION SYSTEM HAVING ROTATING EXCITER Public/Granted day:2024-01-25
Information query
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