- Patent Title: Micromechanical component for a sensor device or microphone device
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Application No.: US17776354Application Date: 2021-01-12
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Publication No.: US12151936B2Publication Date: 2024-11-26
- Inventor: Heribert Weber , Andreas Scheurle , Christoph Hermes , Peter Schmollngruber , Thomas Friedrich
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard A. Messina
- Priority: DE102020200334.3 20200114
- International Application: PCT/EP2021/050428 WO 20210112
- International Announcement: WO2021/144237 WO 20210722
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B7/00 ; G01L1/14 ; H04R19/04 ; H04R31/00

Abstract:
A micromechanical component for a sensor device or microphone device. The micromechanical component includes a diaphragm with a diaphragm inner side to which an electrode structure is directly or indirectly connected; and a cavity that is formed at least in a volume that is exposed by at least one removed area of at least one sacrificial layer. At least one residual area made of at least one electrically insulating sacrificial layer material of the at least one sacrificial layer is also present at the micromechanical component, and including at least one insulation area made of at least one electrically insulating material that is not the same as the electrically insulating sacrificial layer material. The electrode structure is electrically insulated from the diaphragm, and/or the at least one residual area of the at least one sacrificial layer is delimited from the cavity, using the at least one insulation area.
Public/Granted literature
- US20220396477A1 MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE Public/Granted day:2022-12-15
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