Invention Grant
- Patent Title: High-electron-mobility transistor device and method of manufacturing the same
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Application No.: US17671171Application Date: 2022-02-14
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Publication No.: US12166101B2Publication Date: 2024-12-10
- Inventor: Soo Cheol Kang , Hyun Wook Jung , Seong IL Kim , Hae Cheon Kim , Youn Sub Noh , Ho Kyun Ahn , Sang Heung Lee , Jong Won Lim , Sung Jae Chang , Il Gyu Choi
- Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2021-0019933 20210215,KR10-2022-0015641 20220207
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/778

Abstract:
A method of manufacturing a high-electron-mobility transistor device is provided. The method includes sequentially forming a transition layer and a semiconductor layer on a substrate, etching a portion of a surface of the semiconductor layer to form a barrier layer region having a certain depth and forming a barrier layer in the barrier layer region, forming a source electrode and a drain electrode on a 2-dimensional electron gas (2-DEG) layer upward exposed at a surface of the semiconductor layer, in defining the 2-DEG layer formed along an interface between the semiconductor layer and the barrier layer, forming a passivation layer on the semiconductor layer, the barrier layer, the source electrode, and the drain electrode and etching a portion of the passivation layer to upward expose the source electrode, the drain electrode, and the barrier layer, and forming a gate electrode on the upward exposed barrier layer.
Public/Granted literature
- US20220262922A1 HIGH-ELECTRON-MOBILITY TRANSISTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2022-08-18
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