Invention Grant
- Patent Title: Support unit, bake apparatus and substrate treating apparatus including the same
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Application No.: US17848841Application Date: 2022-06-24
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Publication No.: US12174553B2Publication Date: 2024-12-24
- Inventor: Tae Hoon Lee , Jong Gun Lee , Ki Sang Eum
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: Harness, Dickey & Pierce, P.L.C
- Priority: KR10-2021-0083358 20210625
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/38 ; H01L21/67
Abstract:
Provided is a support unit including a support plate on which the substrate is placed, and a support protrusion provided on the support plate and separating the substrate from the support plate, wherein the support plate includes a first protrusion protruding from an upper surface of the support plate, wherein the first protrusion is provided in a support region provided by the support protrusion.
Public/Granted literature
- US20220413397A1 SUPPORT UNIT, BAKE APPARATUS AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Public/Granted day:2022-12-29
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