Invention Grant
- Patent Title: Support unit and substrate treating apparatus
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Application No.: US17703255Application Date: 2022-03-24
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Publication No.: US12237181B2Publication Date: 2025-02-25
- Inventor: Ho Jong Hwang , Do Yeon Kim , Hyun Yoon
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Cheonan-si
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Cheonan-si
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B08B3/02 ; B08B3/04 ; B08B3/08 ; H01L21/687

Abstract:
The present invention provides a substrate treating apparatus. The substrate treating apparatus includes: a cup having a treatment space therein; a support unit configured to support a substrate within the treatment space, and including a rotatable support plate; and a liquid discharge unit configured to discharge a chemical liquid to the substrate supported by the support unit, in which the support unit includes: a plurality of pin members provided to the support plate to support the substrate placed on the support plate; and a discharge member coupled to the pin member to discharge charges to the air according to a rotation of the support plate, and the discharge member is provided as a conductive member.
Public/Granted literature
- US20230307260A1 SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS Public/Granted day:2023-09-28
Information query
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