Memory device and method of fabricating the same
Abstract:
A memory device includes a memory array and at least one first vertical transistor over a dielectric substrate. The at least one first vertical transistor is disposed above the dielectric substrate in a staircase region, and includes: a first wraparound gate layer, a channel pillar, a gate dielectric layer, a first source and drain region, and a second source and drain region. The first wraparound gate layer is laterally adjacent to a gate stack structure of the memory array. The channel pillar extends through the first wraparound gate layer. The gate dielectric layer is disposed between the channel pillar and the first wraparound gate layer. The first source and drain region is disposed below and electrically connected to the bottom of the channel pillar. The second source and drain region is disposed above and electrically connected to the top of the channel pillar.
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