Invention Grant
- Patent Title: Photoresist compositions and pattern formation methods
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Application No.: US17339522Application Date: 2021-06-04
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Publication No.: US12276910B2Publication Date: 2025-04-15
- Inventor: Emad Aqad , Brandon Wenning , Choong-Bong Lee , James W. Thackeray , Ke Yang , James F. Cameron
- Applicant: ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Applicant Address: US MA Marlborough
- Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Current Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
- Current Assignee Address: US MA Marlborough
- Agency: CANTOR COLBURN LLP
- Main IPC: G03F7/039
- IPC: G03F7/039 ; C08F212/14 ; C08F220/18 ; C08F220/28 ; G03F7/004 ; G03F7/038

Abstract:
A photoresist composition comprising: a first polymer comprising a first repeating unit comprising a hydroxy-aryl group and a second repeating unit comprising an acid-labile group; a second polymer comprising a first repeating unit comprising an acid-labile group, a second repeating unit comprising a lactone group, and a third repeating unit comprising a base-soluble group, wherein the base-soluble group has a pKa of less than or equal to 12, and wherein the base-soluble group does not comprise a hydroxy-substituted aryl group; a photoacid generator; and a solvent, wherein the first polymer and the second polymer are different from each other.
Public/Granted literature
- US20220019143A1 PHOTORESIST COMPOSITIONS AND PATTERN FORMATION METHODS Public/Granted day:2022-01-20
Information query
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