Invention Grant
- Patent Title: Vacuum pump and water cooling spacer
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Application No.: US17769161Application Date: 2020-10-27
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Publication No.: US12292058B2Publication Date: 2025-05-06
- Inventor: Tooru Miwata , Yoshiyuki Takai
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JP2019-195540 20191028
- International Application: PCT/JP2020/040330 WO 20201027
- International Announcement: WO2021/085444 WO 20210506
- Main IPC: F04D29/58
- IPC: F04D29/58 ; F04D19/04

Abstract:
A vacuum pump is provided, which is capable of preventing a water cooling spacer, which is one component of a casing, from being damaged by destruction of an interior component. The vacuum pump includes a casing having an inlet port, a stator column provided upright inside the casing, and a rotating body shaped to surround an outer periphery of the stator column, with gas being sucked in from the inlet port by rotation of the rotating body, wherein the casing is composed of a plurality of components including a water cooling spacer having a water cooling pipe disposed therein, and the water cooling spacer is made of an aluminum alloy casting material having an elongation of 5% or more as a mechanical material property.
Public/Granted literature
- US20230272806A1 VACUUM PUMP AND WATER COOLING SPACER Public/Granted day:2023-08-31
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