公开(公告)号：US11542950B2

公开(公告)日：2023-01-03

申请号：US17040799

申请日：2019-03-20

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Takai ,  Yoshiyuki Sakaguchi

IPC: F04D19/04 ,  F04D29/048 ,  F04D29/58

Abstract: A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.

公开(公告)号：US11680585B2

公开(公告)日：2023-06-20

申请号：US17769560

申请日：2020-10-27

Applicant: Edwards Japan Limited

Inventor： Yoshiyuki Takai ,  Tooru Miwata

IPC: F04D29/58 ,  F04D19/04 ,  F04D29/52 ,  F04D29/54

CPC classification number: F04D29/5853 ,  F04D19/042 ,  F04D29/522 ,  F04D29/541 ,  F04D29/542 ,  F04D19/048

Abstract: A vacuum pump includes a rotor provided with a plurality of rotor blades and a rotor cylinder portion, a driving portion, a bearing, stator blades, a thread groove stator that is disposed downstream of the stator blades and has an inner peripheral surface facing an outer peripheral surface of the rotor cylinder portion, and a heat insulating wall disposed downstream of the thread groove. The heat insulating wall includes a ring-shaped annular portion, and a substantially cylindrical wall portion extending from an inner portion of the annular portion in the radial direction to the upstream side and forming a flow path on the outer peripheral surface side. A first corner portion is formed between an upstream-side surface of the annular portion and the outer peripheral surface of the wall portion, the first corner portion being formed in an arc shape.

公开(公告)号：US20210010479A1

公开(公告)日：2021-01-14

申请号：US17040799

申请日：2019-03-20

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Takai ,  Yoshiyuki Sakaguchi

IPC: F04D19/04 ,  F04D29/58 ,  F04D29/048

Abstract: A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.

公开(公告)号：US12188477B2

公开(公告)日：2025-01-07

申请号：US18044815

申请日：2021-10-01

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Sakaguchi ,  Yoshiyuki Takai ,  Yasuhiro Shibata

IPC: F04D19/04 ,  F04D29/32

Abstract: A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.

公开(公告)号：US20220412369A1

公开(公告)日：2022-12-29

申请号：US17762992

申请日：2020-09-18

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Takai

IPC: F04D29/10 ,  F04D19/04 ,  F04D29/58 ,  F04D29/053

Abstract: A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.

公开(公告)号：US20210207619A1

公开(公告)日：2021-07-08

申请号：US17057940

申请日：2018-05-30

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Takai ,  Yoshiyuki Sakaguchi

IPC: F04D29/58 ,  F04D19/04

Abstract: A cooling component includes a plurality of port pairs a flow path through which refrigerant flows, the refrigerant communicating with each of the ports of the plurality of port pairs, and a setting means for setting a usage pattern of the plurality of port pairs. The plurality of port pairs are provided along a circumferential direction of the casing. The setting means sets a selected port pair such that the refrigerant is supplied from outside into the flow path using the first port of the selected port pair and refrigerant is discharged from the flow path to outside using the second port of the selected port pair, and sets another port pair such that the refrigerant cannot be supplied from outside into the flow path or discharged from the flow path using the other port pair.

公开(公告)号：US12292058B2

公开(公告)日：2025-05-06

申请号：US17769161

申请日：2020-10-27

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Takai

IPC: F04D29/58 ,  F04D19/04

Abstract: A vacuum pump is provided, which is capable of preventing a water cooling spacer, which is one component of a casing, from being damaged by destruction of an interior component. The vacuum pump includes a casing having an inlet port, a stator column provided upright inside the casing, and a rotating body shaped to surround an outer periphery of the stator column, with gas being sucked in from the inlet port by rotation of the rotating body, wherein the casing is composed of a plurality of components including a water cooling spacer having a water cooling pipe disposed therein, and the water cooling spacer is made of an aluminum alloy casting material having an elongation of 5% or more as a mechanical material property.

公开(公告)号：US20240280115A1

公开(公告)日：2024-08-22

申请号：US18571958

申请日：2022-07-21

Applicant: Edwards Japan Limited

Inventor： Yoshiyuki Takai ,  Tooru Miwata ,  Yoshiyuki Sakaguchi

IPC: F04D29/60 ,  F04D19/04 ,  F04D29/08

CPC classification number: F04D29/601 ,  F04D19/04 ,  F04D29/083

Abstract: A vacuum pump includes a contact portion that contacts a jig used to adjust the height of a seal member in an axial direction. At the time of assembling the vacuum pump in which a pump fixing component is arranged opposed to the outer periphery of a rotating body, the jig is positioned by the contact portion with the pump fixing component arranged on a base, and the pump fixing component is pressed in the direction of the base by the pressing portion of the positioned jig to adjust the height of the seal member in the axial direction. The pump fixing component is entirely lowered in the direction of the base by the adjustment.

公开(公告)号：US20240026888A1

公开(公告)日：2024-01-25

申请号：US18044815

申请日：2021-10-01

Applicant: Edwards Japan Limited

Inventor： Tooru Miwata ,  Yoshiyuki Sakaguchi ,  Yoshiyuki Takai ,  Yasuhiro Shibata

IPC: F04D19/04 ,  F04D29/32

CPC classification number: F04D19/042 ,  F04D29/321 ,  F05D2250/292

Abstract: A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.

公开(公告)号：US11204042B2

公开(公告)日：2021-12-21

申请号：US17057940

申请日：2018-05-30

Applicant: Edwards Japan Limited

Inventor： Toom Miwata ,  Yoshiyuki Takai ,  Yoshiyuki Sakaguchi

IPC: F04D29/58 ,  F04D19/04

Abstract: A cooling component includes a plurality of port pairs, a flow path through which refrigerant flows, the refrigerant communicating with each of the ports of the plurality of port pairs, and a setting means for setting a usage pattern of the plurality of port pairs. The plurality of port pairs are provided along a circumferential direction of the casing. The setting means sets a selected port pair such that the refrigerant is supplied from outside into the flow path using the first port of the selected port pair and refrigerant is discharged from the flow path to outside using the second port of the selected port pair, and sets another port pair such that the refrigerant cannot be supplied from outside into the flow path or discharged from the flow path using the other port pair.