Invention Application
US20040248363A1 SOI TRENCH CAPACITOR CELL INCORPORATING A LOW-LEAKAGE FLOATING BODY ARRAY TRANSISTOR
有权
具有低泄漏浮体体阵列晶体管的SOI TRENCH电容器单元
- Patent Title: SOI TRENCH CAPACITOR CELL INCORPORATING A LOW-LEAKAGE FLOATING BODY ARRAY TRANSISTOR
- Patent Title (中): 具有低泄漏浮体体阵列晶体管的SOI TRENCH电容器单元
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Application No.: US10250157Application Date: 2003-06-09
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Publication No.: US20040248363A1Publication Date: 2004-12-09
- Inventor: Karen A. Bard , David M. Dobuzinsky , Herbert L. Ho , Mahendar Kumar , Denise Pendleton , Michael D. Steigerwalt , Brian L. Walsh
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L021/8242
- IPC: H01L021/8242

Abstract:
A DRAM array in an SOI wafer having a uniform BOX layer extending throughout the array eliminates the collar oxide step in processing; connects the buried plates with an implant that, in turn, is connected to a conductive plug extending through the device layer and the box that is biased at ground; while the pass transistors are planar NFETs having floating bodies that have a leakage discharge path to ground through a grounded bitline.
Public/Granted literature
- US06964897B2 SOI trench capacitor cell incorporating a low-leakage floating body array transistor Public/Granted day:2005-11-15
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