Invention Application
US20040248363A1 SOI TRENCH CAPACITOR CELL INCORPORATING A LOW-LEAKAGE FLOATING BODY ARRAY TRANSISTOR 有权
具有低泄漏浮体体阵列晶体管的SOI TRENCH电容器单元

SOI TRENCH CAPACITOR CELL INCORPORATING A LOW-LEAKAGE FLOATING BODY ARRAY TRANSISTOR
Abstract:
A DRAM array in an SOI wafer having a uniform BOX layer extending throughout the array eliminates the collar oxide step in processing; connects the buried plates with an implant that, in turn, is connected to a conductive plug extending through the device layer and the box that is biased at ground; while the pass transistors are planar NFETs having floating bodies that have a leakage discharge path to ground through a grounded bitline.
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