- 专利标题: Mass sensor and mass sensing method
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申请号: US10925514申请日: 2004-08-25
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公开(公告)号: US20050016277A1公开(公告)日: 2005-01-27
- 发明人: Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
- 申请人: Yukihisa Takeuchi , Takao Ohnishi , Koji Kimura
- 申请人地址: JP Nagoya-City 467-8530
- 专利权人: NGK Insulators, Ltd.
- 当前专利权人: NGK Insulators, Ltd.
- 当前专利权人地址: JP Nagoya-City 467-8530
- 优先权: JP9-243,073 19970908; JP9-361,368 19971226
- 主分类号: B06B1/06
- IPC分类号: B06B1/06 ; G01G3/16 ; G01H11/08 ; G01N35/00 ; G01P15/09 ; G02B26/02 ; H01L41/09 ; H01L41/113 ; H01L41/187 ; G01H13/00
摘要:
A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.
公开/授权文献
- US06895829B2 Mass sensor and mass sensing method 公开/授权日:2005-05-24
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