公开(公告)号：US20050145032A1

公开(公告)日：2005-07-07

申请号：US11060988

申请日：2005-02-18

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： B06B1/06 ,  G01G3/16 ,  G01H11/08 ,  G01N35/00 ,  G01P15/09 ,  G02B26/02 ,  H01L41/09 ,  H01L41/113 ,  H01L41/187 ,  G01H13/00 ,  G01G3/13 ,  G01G9/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

摘要翻译： 质量传感器，其中连接板和隔膜在其各自的侧面接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。

公开(公告)号：US20050016277A1

公开(公告)日：2005-01-27

申请号：US10925514

申请日：2004-08-25

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： B06B1/06 ,  G01G3/16 ,  G01H11/08 ,  G01N35/00 ,  G01P15/09 ,  G02B26/02 ,  H01L41/09 ,  H01L41/113 ,  H01L41/187 ,  G01H13/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

公开(公告)号：US06457361B1

公开(公告)日：2002-10-01

申请号：US09387012

申请日：1999-08-31

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01H1300

CPC分类号： G01G3/13

摘要： A mass sensor including: a connecting plate having one or more slit(s) and/or opening portion(s) formed therein and/or having a thin-walled portion and a thick-walled portion formed therein; a diaphragm joined with the connecting plate at respective side surfaces; a piezoelectric element; a sensing plate with the piezoelectric element being provided at least at one part on at least one surface of the sensing plate, which has its side surface joined with a side surface of the connecting plate in the direction perpendicular to the joining direction of the diaphragm and the connecting plate; and a sensor substrate with which at least a part of side surfaces of the connecting plate as well as the sensing plate are joined, and the diaphragm, the connecting plate, the sensing plate, and the piezoelectric element form a resonating portion. The mass sensor can conveniently be used for determining the mass of a substance to be sensed by measuring changes in resonant frequencies caused by changes in the mass of the diaphragm on which a catching substance for catching a substance to be sensed by reacting only with the object of sensing is applied.

摘要翻译： 一种质量传感器，包括：连接板，其中形成有一个或多个狭缝和/或开口部分，和/或具有形成在其中的薄壁部分和厚壁部分; 在相应的侧表面处连接有连接板的隔膜; 压电元件; 具有压电元件的检测板至少在传感板的至少一个表面上的一个部分上设置，其侧表面在垂直于隔膜的接合方向的方向上与连接板的侧表面接合， 连接板; 以及传感器基板，连接板的至少一部分的侧面以及感测板与其连接，隔膜，连接板，感测板和压电元件形成谐振部。 质量传感器可以方便地用于通过测量由通过仅与物体反应而捕获待检测物质的捕获物质的膜片的质量变化引起的谐振频率的变化来确定待感测物质的质量 的感应。

公开(公告)号：US06389877B1

公开(公告)日：2002-05-21

申请号：US09367294

申请日：1999-08-10

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01N1100

CPC分类号： G01G3/16

摘要： There is provided a double-headed mass sensor (25) in which between a first connecting plate (22A) joined to a first diaphragm (21A) at respective sides and a second connecting plate (22B) joined to a second diaphragm (21B) at respective sides, a first sensing plate (41A), on which a main element (44) is provided on at least one plane surface, is bridged, and a resonating portion comprising the diaphragms (21A), (21B), the connecting plates (22A), (22B), the first sensing plate (41A) and the main element (44) is joined to a sensor substrate (27). Change in the mass of each of the diaphragms (21A), (21B) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragms (21A), (21B). The mass sensor of the present invention enables the easy and highly accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

摘要翻译： 提供了一种双头质量传感器（25），其中在与第二隔膜（21B）接合的第一连接板（22A）和与第二隔膜（21B）接合的第二连接板（22B）之间 相互的侧面，在至少一个平面上设置有主要元件（44）的第一传感板（41A）被桥接，并且包括隔膜（21A），（21B），连接板 22A），（22B），第一感测板（41A）和主要元件（44）接合到传感器基板（27）。 （21A），（21B）的质量的变化通过测量伴随着膜片（21A），（21B）的质量变化的共振部分的共振频率的变化来测量每个膜片（21A），（21B）的质量的变化。 本发明的质量传感器能够容易且高度精确地测量包括细菌和病毒等微生物，化学物质以及气相沉积膜的厚度的纳刻级的微小质量。

公开(公告)号：US06326563B1

公开(公告)日：2001-12-04

申请号：US09401625

申请日：1999-09-22

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G314

CPC分类号： G01G3/13

摘要： A mass sensor includes a diaphragm, a sensing plate having a piezoelectric element arranged on at least a part of at least one surface joining respective sides, a connecting plate sandwiched by the diaphragm and the sensing plate, wherein the diaphragm, the sensing plate, the piezoelectric element, and the connecting plate form a resonating portion. The connecting plate is bridged across the side surfaces of a concave portion formed in a sensor substrate, and the sensing plate is joined to at least the bottom portion of the concave portion. Change in the mass of the diaphragm is measured by measuring change in the resonant frequencies of the resonating portion accompanying the change in the mass of the diaphragm. The mass sensor enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, or chemical substances, or the thickness of vapor-deposited films.

摘要翻译： 质量传感器包括隔膜，具有布置在连接相应侧面的至少一个表面的至少一部分上的压电元件的感测板，由隔膜和感测板夹持的连接板，其中隔膜，感测板， 压电元件和连接板形成谐振部分。 连接板跨接在形成在传感器基板中的凹部的侧面，并且感测板至少与凹部的底部接合。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。 质量传感器能够容易且准确地测量包括诸如细菌和病毒等微生物或化学物质的纳刻级的微小质量或气相沉积膜的厚度。

公开(公告)号：US06465934B1

公开(公告)日：2002-10-15

申请号：US09214110

申请日：1999-05-05

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

摘要翻译： 一种压电/电致伸缩器件，包括基片和连接板，所述连接板具有连接到所述基片的第一端和沿第一方向延伸的相对的第二端，以及沿垂直于所述第一方向的第二方向的第一和第二相对侧。 固定板连接到连接板的第二端。 第一隔膜的第一侧接合到连接板的第一侧，并且第一隔膜的相对的第二侧接合到基板。 第二隔膜的第一侧接合到基板，并且第二隔膜的相对的第二侧接合到连接板的第二侧。 压电/电致伸缩元件设置在至少一个隔膜的至少一个平面表面的至少一部分上。

公开(公告)号：US06386053B1

公开(公告)日：2002-05-14

申请号：US09297655

申请日：1999-05-04

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G313

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor (30) in which a connection plate (33) and a diaphragm (31) are joined together at their respective sides; a sensing plate (32) is joined to the connection plate (33) at their respective sides in the direction perpendicular to the direction where the diaphragm (31) is joined to the connection plate (33); a piezoelectric element (35) consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate (32); and a resonating portion consisting of the diaphragm (31), the sensing plate (32), the connection plate (33), and the piezoelectric element (35) is joined to a sensor substrate (34). Change in the mass of the diaphragm (31) is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm (31). The mass sensor of the present invention enables the easy and accurate measurement of a minute mass of a nanogram order including microorganisms such as bacteria and viruses, chemical substances, and the thickness of vapor-deposited films.

摘要翻译： 其中连接板（33）和隔膜（31）在其各自侧面接合在一起的质量传感器（30） 感测板（32）在与隔膜（31）接合到连接板（33）的方向垂直的方向上的相应侧面处连接到连接板（33）; 在感测板（32）的板表面的至少任一个上安装由压电膜和电极组成的压电元件（35）; 并且由传感器基板（34）接合由隔膜（31），检测板（32），连接板（33）和压电元件（35）组成的谐振部。 通过测量伴随隔膜（31）的质量变化的谐振部分的谐振频率的变化来测量隔膜（31）的质量的变化。 本发明的质量传感器能够容易且精确地测量包括诸如细菌和病毒的微生物，化学物质和气相沉积膜的微量级的纳刻级的微小质量。

公开(公告)号：US06239534B1

公开(公告)日：2001-05-29

申请号：US09242642

申请日：1998-12-28

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4108

CPC分类号： H01L41/09 ,  H01L41/0933

摘要： A piezoelectric/electrostrictive device is provided in which a connection plate whose one end in the longitudinal direction is held by two diaphragms and whose other end is held by two other diaphragms is spanned between bottoms of faced concave portions formed on a substrate, and piezoelectric elements are arranged on at least a part of at least one-side plane surface of each of the diaphragms, and the diaphragms are connected with the sides of the concave portions in at least the direction for the diaphragms to hold the connection plate, and a fixing plate is connected to the connection plate so that the longitudinal direction of the fixing plate becomes parallel with the direction for the diaphragms to hold the connection plate. A displacement of the fixing plate generated by applying a voltage to the piezoelectric element is utilized or an electromotive force of the piezoelectric element based on a displacement of the fixing plate is utilized. The piezoelectric/electrostrictive device is preferably used as a positioning- or angle-adjustment mechanism of an optical unit or precision unit, a vibrator or resonator for communication or motive power, an oscillator, a discriminator, an ultrasonic sensor, or an acceleration sensor because the device is able to convert electric energy into mechanical energy such as a mechanical displacement, force, or vibration and vice versa.

摘要翻译： 提供一种压电/电致伸缩器件，其中纵向方向上的一端由两个隔膜保持并且另一端由另外两个隔膜保持的连接板横跨在形成在基板上的面对凹部的底部和压电元件 布置在每个隔膜的至少一个侧平面表面的至少一部分上，并且隔膜至少在隔膜的方向上与凹部的侧面连接以保持连接板，并且固定 板连接到连接板，使得固定板的纵向方向平行于用于保持连接板的隔膜的方向。 利用通过向压电元件施加电压而产生的固定板的位移，或者利用基于固定板的位移的压电元件的电动势。 压电/电致伸缩装置优选地用作光学单元或精密单元的定位或角度调节机构，用于通信或动力的振动器或谐振器，振荡器，鉴别器，超声波传感器或加速度传感器，因为 该装置能够将电能转换成机械能，例如机械位移，力或振动，反之亦然。

公开(公告)号：US07089813B2

公开(公告)日：2006-08-15

申请号：US11060988

申请日：2005-02-18

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： G01G9/00

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A mass sensor in which a connection plate and a diaphragm are joined together at their respective sides; a sensing plate is joined to the connection plate at their respective sides in the direction perpendicular to the direction where the diaphragm is joined to the connection plate; a piezoelectric element consisting of a piezoelectric film and an electrode is installed on at least either one of plate surfaces of the sensing plate; and a resonating portion consisting of the diaphragm, the sensing plate, the connection plate, and the piezoelectric element is joined to a sensor substrate. Change in the mass of the diaphragm is measured by measuring change in the resonant frequency of the resonating portion accompanying the change in the mass of the diaphragm.

摘要翻译： 质量传感器，其中连接板和隔膜在其各自的侧面接合在一起; 感测板在垂直于隔膜接合方向的连接板的相应侧面处连接到连接板; 由压电膜和电极构成的压电元件安装在感测板的板表面的至少任一个上; 并且由隔膜，感测板，连接板和压电元件组成的谐振部分接合到传感器基板。 通过测量伴随隔膜质量变化的谐振部分的谐振频率的变化来测量隔膜质量的变化。

公开(公告)号：US06724127B2

公开(公告)日：2004-04-20

申请号：US10231737

申请日：2002-08-30

申请人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

发明人： Yukihisa Takeuchi ,  Takao Ohnishi ,  Koji Kimura

IPC分类号： H01L4104

CPC分类号： G01P15/0922 ,  B06B1/06 ,  B06B1/0648 ,  G01G3/16 ,  G01H11/08 ,  G01N2035/00217 ,  G01N2035/00237 ,  G01N2291/02827 ,  G01P15/09 ,  G01P2015/0814 ,  H01L41/0973 ,  H01L41/1132

摘要： A piezoelectric/electrostrictive device including a substrate and a connection plate having a first end joined to the substrate and an opposed second end extending along a first direction, and first and second opposed sides along a second direction perpendicular to the first direction. A fixing plate is joined to the second end of the connection plate. A first side of a first diaphragm is joined to the first side of the connection plate and an opposed second side of the first diaphragm is joined to the substrate. A first side of a second diaphragm is joined to the substrate and an opposed second side of the second diaphragm is joined to the second side of the connection plate. A piezoelectric/electrostrictive element is provided on at least a portion of at least one planar surface of at least one of the diaphragms.

摘要翻译： 一种压电/电致伸缩器件，包括基片和连接板，所述连接板具有连接到所述基片的第一端和沿第一方向延伸的相对的第二端，以及沿垂直于所述第一方向的第二方向的第一和第二相对侧。 固定板连接到连接板的第二端。 第一隔膜的第一侧接合到连接板的第一侧，并且第一隔膜的相对的第二侧接合到基板。 第二隔膜的第一侧接合到基板，并且第二隔膜的相对的第二侧接合到连接板的第二侧。 压电/电致伸缩元件设置在至少一个隔膜的至少一个平面表面的至少一部分上。