发明申请
- 专利标题: Polishing composition
- 专利标题(中): 抛光组成
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申请号: US10934670申请日: 2004-09-03
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公开(公告)号: US20050054203A1公开(公告)日: 2005-03-10
- 发明人: Shuhei Yamada
- 申请人: Shuhei Yamada
- 优先权: JP2003-313838 20030905
- 主分类号: B24B37/00
- IPC分类号: B24B37/00 ; C09G1/02 ; C09K3/14 ; H01L21/304 ; H01L21/306 ; H01L21/311
摘要:
The present invention relates to a polishing composition that can be preferably used to polish a silicon wafer. The polishing composition includes a block polyether represented by the chemical formula HO-(EO)a—(PO)b-(EO)c—H, wherein EO represents an oxyethylene group, PO represents an oxypropylene group, each of a and c represents the polymerization degree of ethylene oxide, b represents the polymerization degree of propylene oxide, and each of a, b, and c is an integer of 1 or greater; silicon dioxide; a basic compound; at least either one of hydroxyethyl cellulose and polyvinyl alcohol; and water.
公开/授权文献
- US07204865B2 Polishing composition 公开/授权日:2007-04-17
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