发明申请
- 专利标题: Magnetoresistance effect device, method of manufacturing the same, magnetic memory apparatus, personal digital assistance, and magnetic reproducing head, and magnetic information reproducing apparatus
- 专利标题(中): 磁阻效应装置及其制造方法,磁存储装置,个人数字助理和磁再现头以及磁信息重放装置
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申请号: US10626707申请日: 2003-07-25
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公开(公告)号: US20050078417A1公开(公告)日: 2005-04-14
- 发明人: Tatsuya Kishi , Shigeki Takahashi , Kentaro Nakajima , Minoru Amano , Masayuki Sagoi , Yoshiaki Saito
- 申请人: Tatsuya Kishi , Shigeki Takahashi , Kentaro Nakajima , Minoru Amano , Masayuki Sagoi , Yoshiaki Saito
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 优先权: JP2001-076614 20010316
- 主分类号: G01R33/09
- IPC分类号: G01R33/09 ; G11B5/39 ; G11C11/14 ; G11C11/15 ; G11C11/16 ; H01F10/16 ; H01F10/32 ; H01L21/8246 ; H01L27/105 ; H01L27/22 ; H01L43/08 ; H01L43/12
摘要:
Magnetoresistance effect devices for attaining magnetically stability and for reducing a switching magnetic field. One of the ferromagnetic layers of the magnetoresistance effect device has a plane shape in which a width of an end portions is wider than a center portion sandwiched by two end portions. The end portions are not symmetrical with respect to an easy magnetization axis or longer axis of the plane shape of ferromagnetic material layer, but are substantially rotationally symmetrical with a center of the plane shape as a pivot. The plane shape may have an S-shape where its magnetic domain is stabilized and the switching magnetic field is reduced. The manufacturing method uses two linear mask patterns intersecting with each other to form sharp corners of a ferromagnetic tunnel junction. An electron beam (EB) drawing may be used to form the S-shape plane. The magnetoresistance effect devices may be used in a magnetic memory apparatus, such as a random access memory, a personal digital assistance, a magnetic reproducing head, and a magnetic information reproducing apparatus.
公开/授权文献
- US07140096B2 Method of manufacturing a magnetoresistance effect device 公开/授权日:2006-11-28
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