发明申请
US20050080214A1 Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer
有权
多功能环状硅酸盐化合物，由该化合物制备的硅氧烷基聚合物和使用聚合物制备绝缘膜的方法
- 专利标题： Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer
- 专利标题（中）： 多功能环状硅酸盐化合物，由该化合物制备的硅氧烷基聚合物和使用聚合物制备绝缘膜的方法
-
申请号： US10841553申请日： 2004-05-10
-
公开(公告)号： US20050080214A1公开(公告)日： 2005-04-14
- 发明人: Hyeon Shin , Hyun Jeong , Jong Seon , Kwang Lee , Sang Mah
- 申请人： Hyeon Shin , Hyun Jeong , Jong Seon , Kwang Lee , Sang Mah
- 优先权： KR2003-70193 20031009
- 主分类号： B05D5/12
- IPC分类号： B05D5/12 ; B05D7/24 ; C07F7/18 ; C07F7/21 ; C08G77/02 ; C08G77/04 ; C08G77/06 ; C08G77/08 ; C08G77/14 ; C08G77/50 ; C09D5/25 ; C09D183/02 ; C09D183/04 ; C09D183/14 ; H01L21/312
摘要：
A multi-functional cyclic silicate compound, a siloxane-based polymer prepared from the silicate compound and a process of producing an insulating film using the siloxane-based polymer. The silicate compound of the present invention is highly compatible with conventional pore-generating substances and hardly hygroscopic, so it is useful for the preparation of a siloxane-based polymer suitable to a SOG process. Furthermore, a film produced by the use of such siloxane-based polymer is excellent in mechanical properties, thermal stability and crack resistance and enhanced in insulating properties by virtue of its low hygroscopicity. Therefore, in the field of semiconductor production, this film is of great use as an insulating film.