发明申请
US20050087139A1 Antenna for use in producing plasma and plasma processing apparatus comprising the same 审中-公开
用于制造等离子体和等离子体处理装置的天线

Antenna for use in producing plasma and plasma processing apparatus comprising the same
摘要:
An antenna includes branches having substantially identical shapes. The branches are symmetrically disposed about a central point and extend along at least two concentric patterns whose geometric centers coincide with the central point. The branches each include pattern-forming portions that lie entirely within the concentric patterns, and at least one connecting portion extending between and connecting the pattern-forming portions. Input/output terminals for allowing a voltage to be impressed across the branches are provided at ends of each of the branches.
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