Invention Application
- Patent Title: Floating gate and fabrication method therefor
- Patent Title (中): 浮门及其制造方法
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Application No.: US11014483Application Date: 2004-12-15
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Publication No.: US20050101090A1Publication Date: 2005-05-12
- Inventor: Ying-Cheng Chuang , Chung-Lin Huang , Chi-Hui Lin
- Applicant: Ying-Cheng Chuang , Chung-Lin Huang , Chi-Hui Lin
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Priority: TW91116811 20020726
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/423 ; H01L21/336

Abstract:
A floating gate with multiple tips and a fabrication method thereof. A semiconductor substrate is provided, on which a patterned hard mask layer is formed, wherein the patterned hard mask layer has an opening. A gate dielectric layer and a first conducting layer with a first predetermined thickness are formed on the bottom of the opening. A spacer is formed on the sidewall of the opening. A conducting spacer is formed on the sidewall of the spacer. The first conducting layer is etched to a second predetermined thickness. A multi-tip floating gate is provided by the first conducting layer and the conducting spacer. A protecting layer is formed in the opening. The patterned hard mask layer, the gate dielectric layer, a portion of the protecting layer, and a portion of the first spacer are etched to expose the surface of the first conducting layer.
Information query
IPC分类: