发明申请
US20050121712A1 Flash memory cell and method of manufacturing the same and programming/erasing/reading method of flash memory cell
审中-公开
闪存单元及其制造方法和闪存单元的编程/擦除/读取方法
- 专利标题: Flash memory cell and method of manufacturing the same and programming/erasing/reading method of flash memory cell
- 专利标题(中): 闪存单元及其制造方法和闪存单元的编程/擦除/读取方法
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申请号: US11040969申请日: 2005-01-21
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公开(公告)号: US20050121712A1公开(公告)日: 2005-06-09
- 发明人: Sung Park , Young You , Yong Kim , Yoo Jeon
- 申请人: Sung Park , Young You , Yong Kim , Yoo Jeon
- 申请人地址: KR Gyunggi-do
- 专利权人: HYNIX SEMICONDUCTOR INC.
- 当前专利权人: HYNIX SEMICONDUCTOR INC.
- 当前专利权人地址: KR Gyunggi-do
- 优先权: KR2002-42169 20020718
- 主分类号: G11C11/56
- IPC分类号: G11C11/56 ; G11C16/02 ; G11C16/04 ; H01L21/8247 ; H01L27/115 ; H01L29/788 ; H01L29/792 ; H01L21/336 ; H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119
摘要:
Disclosed is a flash memory cell and method of manufacturing the same, and programming/erasing/reading method thereof. The flash memory cell comprises a first tunnel oxide film formed at a given region of a semiconductor substrate, a first floating gate formed on the first tunnel oxide film, a second tunnel oxide film formed over the semiconductor substrate and along one sidewall of the first floating gate, a second floating g ate isolated from the first floating gate while contacting the second tunnel oxide film, a dielectric film formed on the first floating gate and the second floating gate, a control gate formed on the dielectric film, a first junction region formed in the semiconductor substrate below one side of the second tunnel oxide film, and a second junction region formed in the semiconductor substrate below one side of the first tunnel oxide film. Therefore, the present invention can implement 2-bit cell or 3-bit cell of a high density using the existing process technology. Further, it can reduce the manufacture cost and implement a high-integrated flash memory cell that is advantageous than a conventional flash memory cell in view of charge storage/retention as well as programming time.
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