发明申请
US20050147360A1 Vertical cavity surface emitting laser module 有权
垂直腔表面发射激光模块

Vertical cavity surface emitting laser module
摘要:
A vertical cavity surface emitting laser (VCSEL) module includes a substrate provided with an etched region formed on a lower surface thereof, a plurality of layers, for photoproduction, laminated on an upper surface of the substrate, and a VCSEL for emitting the light upwards and downwards, wherein the VCSEL module monitors the output of the VCSEL by detecting the light emitted downwards from the VCSEL.
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