发明申请
- 专利标题： Method of monitoring introduction of interfacial species
- 专利标题（中）： 监测界面物种引进方法
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申请号： US11076371申请日： 2005-03-09
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公开(公告)号： US20050153467A1公开(公告)日： 2005-07-14
- 发明人: Lance Genicola , Mark Hurley , Jeremy Kempisty , Paul Kirsch , Ravikumar Ramachandran , Suri Hedge
- 申请人： Lance Genicola , Mark Hurley , Jeremy Kempisty , Paul Kirsch , Ravikumar Ramachandran , Suri Hedge
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/28 ; H01L21/314 ; H01L21/318 ; H01L29/51 ; H01L21/66 ; G01R31/26 ; G06F19/00 ; H01L21/336
摘要：
A method for monitoring a nitridation process, including: (a) providing a semiconductor substrate; (b) forming a first dielectric layer on a top surface of the substrate; (c) introducing a quantity of interfacial species into the substrate; (d) removing the first dielectric layer; (e) forming a second dielectric layer on the top surface of the substrate; (f) measuring the density of interface traps between the substrate and the second dielectric layer; (g) providing a predetermined relationship between the quantity of the interfacial species and the density of the interface traps; and (h) determining the quantity of the interfacial species introduced based on the relationship.
公开/授权文献
- US07335969B2 Method of monitoring introduction of interfacial species 公开/授权日：2008-02-26
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