- 专利标题: Light emitting element, method of manufacturing the same, and semiconductor device having light emitting element
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申请号: US11121453申请日: 2005-05-04
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公开(公告)号: US20050218419A1公开(公告)日: 2005-10-06
- 发明人: Haruhiko Okazaki , Hideto Sugawara
- 申请人: Haruhiko Okazaki , Hideto Sugawara
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 优先权: JP2000-200298 20000630
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L33/06 ; H01L33/10 ; H01L33/32 ; H01L33/40 ; H01L33/00
摘要:
An InGaN active layer is formed on a sapphire substrate. A p-side electrode is formed on the InGaN active layer to supply an electric current to this InGaN active layer. The p-side electrode includes {circle over (1)} an Ni layer for forming an ohmic contact with a p-GaN layer, {circle over (2)} an Mo layer having a barrier function of preventing diffusion of impurities, {circle over (3)} an Al layer as a high-reflection electrode, {circle over (4)} a Ti layer having a barrier function, and {circle over (5)} an Au layer for improving the contact with a submount on a lead frame. The p-side electrode having this five-layered structure realizes an ohmic contact and high reflectance at the same time.
公开/授权文献
- US07355212B2 Light emitting element 公开/授权日:2008-04-08
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