发明申请
- 专利标题： Manufacture of probe unit having lead probes extending beyond edge of substrate
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申请号： US11179659申请日： 2005-07-13
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公开(公告)号： US20050266690A1公开(公告)日： 2005-12-01
- 发明人: Atsuo Hattori , Toshitaka Yoshino , Tetsutsugu Hamano , Masahiro Sugiura
- 申请人： Atsuo Hattori , Toshitaka Yoshino , Tetsutsugu Hamano , Masahiro Sugiura
- 专利权人： Yamaha Corporation
- 当前专利权人： Yamaha Corporation
- 优先权： JP2001-086267 20010323
- 主分类号： G01R31/26
- IPC分类号： G01R31/26 ; G01R1/067 ; G01R1/073 ; G01R3/00 ; H01L21/66 ; H01L21/44 ; H01L21/26 ; H01L21/302 ; H01L21/311 ; H01L21/324 ; H01L21/42 ; H01L21/461 ; H01L21/477
摘要：
A sacrificial layer is formed in a recess of a substrate, and leads extending from the substrate into an area of the sacrificial layer are formed. A cut is formed from the bottom surface of the substrate, the cut extending from the bottom surface to the area of the sacrificial layer via the substrate, then the sacrificial layer is removed. A probe unit can be obtained having the leads whose front portions extend beyond the edge of the substrate. A through conductor may be formed in a through hole formed in a substrate. Leads may be formed on a photosensitive etching glass substrate to thereafter selectively etch the chemically cutting type glass.