发明申请
US20060208316A1 High performance tunneling-biased MOSFET and a process for its manufacture
有权
高性能隧道偏置MOSFET及其制造工艺
- 专利标题: High performance tunneling-biased MOSFET and a process for its manufacture
- 专利标题(中): 高性能隧道偏置MOSFET及其制造工艺
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申请号: US11081993申请日: 2005-03-16
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公开(公告)号: US20060208316A1公开(公告)日: 2006-09-21
- 发明人: Kuo-Nan Yang , Yi-Ling Chang , You-Lin Chu , Hou-Yu Chen , Fu-Liang Yang , Chenming Hu
- 申请人: Kuo-Nan Yang , Yi-Ling Chang , You-Lin Chu , Hou-Yu Chen , Fu-Liang Yang , Chenming Hu
- 申请人地址: TW Hsin-Chu 300-77
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu 300-77
- 主分类号: H01L29/94
- IPC分类号: H01L29/94
摘要:
A semiconductor structure and a method for its manufacture are provided. In one example, the structure includes a well region doped with a first type dopant (e.g., a P-type or N-type dopant). A gate pedestal formed over the well region has two ends, one of which at least partially overlies the well region and is doped with the first type dopant. A dielectric layer is positioned between the gate pedestal and the well region. Source and drain regions formed on opposite sides of the gate pedestal within the well region are doped with a second type dopant opposite in type to the first type dopant.
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