发明申请
- 专利标题: GROWTH OF REDUCED DISLOCATION DENSITY NON-POLAR GALLIUM NITRIDE
- 专利标题(中): 减少偏差密度非极性氮化钠的生长
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申请号: US11670332申请日: 2007-02-01
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公开(公告)号: US20070126023A1公开(公告)日: 2007-06-07
- 发明人: Benjamin Haskell , Michael Craven , Paul Fini , Steven DenBaars , James Speck , Shuji Nakamura
- 申请人: Benjamin Haskell , Michael Craven , Paul Fini , Steven DenBaars , James Speck , Shuji Nakamura
- 申请人地址: US CA Oakland 94607
- 专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
- 当前专利权人地址: US CA Oakland 94607
- 主分类号: H01L33/00
- IPC分类号: H01L33/00
摘要:
Lateral epitaxial overgrowth (LEO) of non-polar gallium nitride (GaN) films results in significantly reduced defect density.
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