发明申请
- 专利标题： Contamination barrier with expandable lamellas
- 专利标题（中）： 可扩展薄片的污染屏障
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申请号： US11798710申请日： 2007-05-16
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公开(公告)号： US20070222956A1公开(公告)日： 2007-09-27
- 发明人: Levinus Bakker , Marcel Marie Dierichs , Johannes Freriks , Frank Schuurmans , Jakob Vijfvinkel , Wilhelmus Box
- 申请人： Levinus Bakker , Marcel Marie Dierichs , Johannes Freriks , Frank Schuurmans , Jakob Vijfvinkel , Wilhelmus Box
- 申请人地址： NL Veldhoven
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： NL Veldhoven
- 优先权： EP02080454.8 20021223; EP03075086.3 20030113
- 主分类号： G03B27/52
- IPC分类号： G03B27/52
摘要：
A contamination barrier configured to permit radiation from a radiation source to pass through and to capture debris from the radiation source. The contamination barrier includes a support structure, a plurality of plate members arranged on the support structure and extending in a radial direction from an axis of the support structure, and a shield configured to block at least part of the support structure from being hit by radiation or debris from the radiation source.
公开/授权文献
- US07737425B2 Contamination barrier with expandable lamellas 公开/授权日：2010-06-15