发明申请
- 专利标题: Methods and apparatus for beam density measurement in two dimensions
- 专利标题(中): 二维光束密度测量的方法和装置
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申请号: US11477335申请日: 2006-06-29
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公开(公告)号: US20080073550A1公开(公告)日: 2008-03-27
- 发明人: Atul Gupta , Joseph C. Olson , Gregg A. Norris
- 申请人: Atul Gupta , Joseph C. Olson , Gregg A. Norris
- 申请人地址: US MA Gloucester
- 专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人: Varian Semiconductor Equipment Associates, Inc.
- 当前专利权人地址: US MA Gloucester
- 主分类号: G01K1/08
- IPC分类号: G01K1/08
摘要:
A beam density measurement system includes a shield, a beam sensor, and an actuator. The beam sensor is positioned downstream from the shield in a direction of travel of a beam. The beam sensor is configured to sense an intensity of the beam, and the beam sensor has a long dimension and a short dimension. The actuator translates the shield relative to the beam sensor, wherein the shield blocks at least a portion of the beam from the beam sensor as the shield is translated relative to the beam sensor, and wherein measured values of the intensity associated with changes in a position of the shield relative to the beam sensor are representative of a beam density distribution of the beam in a first direction defined by the long dimension of the beam sensor.
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