发明申请
- 专利标题: METHOD FOR COMPOSITION CONTROL OF A METAL COMPOUND FILM
- 专利标题(中): 金属化合物膜的组成控制方法
-
申请号: US11696507申请日: 2007-04-04
-
公开(公告)号: US20080249650A1公开(公告)日: 2008-10-09
- 发明人: Russell D. Allen , Stephen L. Brown , Alessandro C. Callegari , Michael P. Chudzik , Vijay Narayanan , Vamsi K. Paruchuri
- 申请人: Russell D. Allen , Stephen L. Brown , Alessandro C. Callegari , Michael P. Chudzik , Vijay Narayanan , Vamsi K. Paruchuri
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: G06F19/00
- IPC分类号: G06F19/00 ; G01N21/00
摘要:
Measurement of the extinction coefficient k is employed for effective and prompt in-line monitoring and/or controlling of the metal film composition. The dependency of the extinction coefficient on the composition of a metal compound is characterized by measuring the extinction coefficients of a series of the metal compound with different compositions. A monitor metal film is then deposited on a wafer. The extinction coefficient k of the film on the wafer is measured and a film compositional parameter is extracted. The wafer processing may continue if k is in specification or the needed compositional change in the film may be extracted from the measured value of the k and the established dependence of k on the composition of the film for out-of-spec k values.
公开/授权文献
- US07772016B2 Method for composition control of a metal compound film 公开/授权日:2010-08-10