发明申请
- 专利标题: ASYMMETRIC FIELD EFFECT TRANSISTOR STRUCTURE AND METHOD
- 专利标题(中): 不对称场效应晶体管结构与方法
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申请号: US11778185申请日: 2007-07-16
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公开(公告)号: US20090020806A1公开(公告)日: 2009-01-22
- 发明人: Brent A. Anderson , Andres Bryant , William F. Clark, JR. , Edward J. Nowak
- 申请人: Brent A. Anderson , Andres Bryant , William F. Clark, JR. , Edward J. Nowak
- 主分类号: H01L29/78
- IPC分类号: H01L29/78 ; H01L21/336 ; H01L29/76
摘要:
Disclosed are embodiments of an asymmetric field effect transistor structure and a method of forming the structure in which both series resistance in the source region (Rs) and gate to drain capacitance (Cgd) are reduced in order to provide optimal performance (i.e., to provide improved drive current with minimal circuit delay). Specifically, different heights of the source and drain regions and/or different distances between the source and drain regions and the gate are tailored to minimize series resistance in the source region (i.e., in order to ensure that series resistance is less than a predetermined resistance value) and in order to simultaneously to minimize gate to drain capacitance (i.e., in order to simultaneously ensure that gate to drain capacitance is less than a predetermined capacitance value).
公开/授权文献
- US07915670B2 Asymmetric field effect transistor structure and method 公开/授权日:2011-03-29
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