发明申请
- 专利标题: LATERALLY DOUBLE-DIFFUSED METAL OXIDE SEMICONDUCTOR TRANSISTOR AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 侧向双金属氧化物半导体晶体管及其制造方法
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申请号: US12429951申请日: 2009-04-24
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公开(公告)号: US20090209075A1公开(公告)日: 2009-08-20
- 发明人: Cheng-Chi LIN , Shin Su , Chein-Wen Chu , Shih-Chin Lien , Chin-Pen Yeh
- 申请人: Cheng-Chi LIN , Shin Su , Chein-Wen Chu , Shih-Chin Lien , Chin-Pen Yeh
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 优先权: TW94139008 20051107
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
The present invention discloses a laterally double-diffused metal oxide semiconductor transistor (LDMOS) and a method for fabricating the same. The LDMOS includes a substrate, a first well, a drain, a second well and a source. The substrate includes a first conductive dopant. The first well includes a second conductive dopant and formed in a part of the substrate, and the drain is located in the first well. The second well includes the first conductive dopant and formed in another part of the substrate, and the source located in the second well. The source includes a lightly doped region and a heavily doped region extending downwardly from a top surface of the substrate. The depth of the lightly doped region is more than the depth of the heavily doped region.
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