公开(公告)号：US20090209075A1

公开(公告)日：2009-08-20

申请号：US12429951

申请日：2009-04-24

申请人： Cheng-Chi LIN ,  Shin Su ,  Chein-Wen Chu ,  Shih-Chin Lien ,  Chin-Pen Yeh

发明人： Cheng-Chi LIN ,  Shin Su ,  Chein-Wen Chu ,  Shih-Chin Lien ,  Chin-Pen Yeh

IPC分类号： H01L21/336

CPC分类号： H01L29/0847 ,  H01L29/086 ,  H01L29/0878 ,  H01L29/42368 ,  H01L29/4933 ,  H01L29/66659 ,  H01L29/7816 ,  H01L29/7835

摘要： The present invention discloses a laterally double-diffused metal oxide semiconductor transistor (LDMOS) and a method for fabricating the same. The LDMOS includes a substrate, a first well, a drain, a second well and a source. The substrate includes a first conductive dopant. The first well includes a second conductive dopant and formed in a part of the substrate, and the drain is located in the first well. The second well includes the first conductive dopant and formed in another part of the substrate, and the source located in the second well. The source includes a lightly doped region and a heavily doped region extending downwardly from a top surface of the substrate. The depth of the lightly doped region is more than the depth of the heavily doped region.

摘要翻译： 本发明公开了一种横向双扩散金属氧化物半导体晶体管（LDMOS）及其制造方法。 LDMOS包括衬底，第一阱，漏极，第二阱和源极。 衬底包括第一导电掺杂剂。 第一阱包括第二导电掺杂剂并形成在衬底的一部分中，并且漏极位于第一阱中。 第二阱包括第一导电掺杂剂并且形成在衬底的另一部分中，并且源位于第二阱中。 源包括从衬底的顶表面向下延伸的轻掺杂区域和重掺杂区域。 轻掺杂区域的深度大于重掺杂区域的深度。