Invention Application
- Patent Title: System and method for providing a high frequency response silicon photodetector
- Patent Title (中): 提供高频响应硅光电探测器的系统和方法
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Application No.: US11541975Application Date: 2006-10-02
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Publication No.: US20100025787A1Publication Date: 2010-02-04
- Inventor: Michael W. Geis , Steven J. Spector , Donna M. Lennon , Matthew E. Grein , Robert T. Schulein , Jung U. Yoon , Franz Xaver Kaertner , Fuwan Gan , Theodore M. Lyszczarz
- Applicant: Michael W. Geis , Steven J. Spector , Donna M. Lennon , Matthew E. Grein , Robert T. Schulein , Jung U. Yoon , Franz Xaver Kaertner , Fuwan Gan , Theodore M. Lyszczarz
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Main IPC: H01L31/0352
- IPC: H01L31/0352 ; H01L21/30 ; H01L31/0232

Abstract:
A Silicon photodetector contains an insulating substrate having a top surface and a bottom surface. A Silicon layer is located on the top surface of the insulating substrate, where the Silicon layer contains a center region, the center region being larger in thickness than the rest of the Silicon layer. A top Silicon dioxide layer is located on a top surface of the center region. A left wing of the center region and a right wing of the center region are doped. The Silicon photodetector also has an active region located within the center region, where the active region contains a tailored crystal defect-impurity combination and Oxygen atoms.
Public/Granted literature
- US07880204B2 System and method for providing a high frequency response silicon photodetector Public/Granted day:2011-02-01
Information query
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