Invention Application
US20100025787A1 System and method for providing a high frequency response silicon photodetector 有权
提供高频响应硅光电探测器的系统和方法

System and method for providing a high frequency response silicon photodetector
Abstract:
A Silicon photodetector contains an insulating substrate having a top surface and a bottom surface. A Silicon layer is located on the top surface of the insulating substrate, where the Silicon layer contains a center region, the center region being larger in thickness than the rest of the Silicon layer. A top Silicon dioxide layer is located on a top surface of the center region. A left wing of the center region and a right wing of the center region are doped. The Silicon photodetector also has an active region located within the center region, where the active region contains a tailored crystal defect-impurity combination and Oxygen atoms.
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