发明申请
- 专利标题： REMOVAL OF A SHEET FROM A PRODUCTION APPARATUS
- 专利标题（中）： 从生产设备中取出一张纸
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申请号： US12580719申请日： 2009-10-16
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公开(公告)号： US20100221142A1公开(公告)日： 2010-09-02
- 发明人: Peter L. KELLERMAN , Frederick Carlson , Frank Sinclair
- 申请人： Peter L. KELLERMAN , Frederick Carlson , Frank Sinclair
- 申请人地址： US MA Gloucester
- 专利权人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人： VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- 当前专利权人地址： US MA Gloucester
- 主分类号： C22C28/00
- IPC分类号： C22C28/00 ; C30B11/02 ; C01B33/021 ; C01B33/06 ; C01B21/06 ; B28B13/00
摘要：
A melt of a material is cooled and a sheet of the material is formed in the melt. This sheet is transported, cut into at least one segment, and cooled in a cooling chamber. The material may be Si, Si and Ge, Ga, or GaN. The cooling is configured to prevent stress or strain to the segment. In one instance, the cooling chamber has gas cooling.
公开/授权文献
- US07998224B2 Removal of a sheet from a production apparatus 公开/授权日：2011-08-16