发明申请
US20110032659A1 COMPLIMENTARY METAL-INSULATOR-METAL (MIM) CAPACITORS AND METHOD OF MANUFACTURE
有权
合金金属绝缘子金属(MIM)电容器及其制造方法
- 专利标题: COMPLIMENTARY METAL-INSULATOR-METAL (MIM) CAPACITORS AND METHOD OF MANUFACTURE
- 专利标题(中): 合金金属绝缘子金属(MIM)电容器及其制造方法
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申请号: US12535769申请日: 2009-08-05
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公开(公告)号: US20110032659A1公开(公告)日: 2011-02-10
- 发明人: James S. Dunn , Zhong-Xiang He , Anthony K. Stamper
- 申请人: James S. Dunn , Zhong-Xiang He , Anthony K. Stamper
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01G4/38
- IPC分类号: H01G4/38 ; C23F1/00 ; B05D5/12 ; H01G4/06
摘要:
A high density capacitor and low density capacitor simultaneously formed on a single wafer and a method of manufacture is provided. The method includes depositing a bottom plate on a dielectric material; depositing a low-k dielectric on the bottom plate; depositing a high-k dielectric on the low-k dielectric and the bottom plate; depositing a top plate on the high-k dielectric; and etching a portion of the bottom plate and the high-k dielectric to form a first metal-insulator-metal (MIM) capacitor having a dielectric stack with a first thickness and a second MIM capacitor having a dielectric stack with a second thickness different than the first thickness.
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